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Modeling of Dual Emission Laser Induced Fluorescence for Slurry Thickness Measurements in Chemical Mechanical Polishing

Author(s)

Gray, Caprice
Rogers, Chris B.
Manno, Vincent P.

Description

Dual emission laser induced fluorescence (DELIF) is a technique for measuring the instantaneous thin fluid film thickness in dynamic systems. Two fluorophores within the system produce laser induced e...

Type of Resource

Article

Rights Statements

In Copyright - Educational Use Permitted