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A Novel Oxygen Gas Sensor Utilizing Thin Film Diamond Diode with Catalyzed Tin Oxide Electrode
Author(s)
Kerns, David V.
Gurbuz, Y
Kang, W P
Description
Anovel microelectronic device utilizing the gas sensing properties of tinoxide SnOx and electrical properties of plasma enhanced chemical vapor deposited (PECVD) diamondfilm for oxygengas sensing at h...
Type of Resource
Article
Rights Statements
In Copyright - Educational Use Permitted